(La,Sr)(Al,Ta)O3
The strontium lanthanum aluminate crystal has no twins and phase transitions from the melting point to the low temperature. It has the same structure as the high-temperature superconductor YBCO. Compared with other substrates, the<001>plane has a moderate lattice mismatch with YBCO<001>. (2.5~3.5%). At the same time, the thermal expansion coefficient of this crystal is lower than that of other perovskite crystals, which can deposit films at lower temperatures to improve lattice mismatch and reduce stress.
使用/应用
Suitable for deposit films at low temperatures to improve lattice mismatch and reduce stress.
特点/优势
No twins and phase transitions from the melting point to the low temperature. Has the same structure as the high-temperature superconductor YBCO.
Moderate lattice mismatch with YBCO<001>. (2.5~3.5%).
Thermal expansion coefficient of this crystal is low.
-
Crystal structure
Quartet
Crystal growth method
Czochralski technology
Lattice constant
a=3.756Å c=12.63 Å
Melting point（℃）
1650
Density
5.92（g/cm3）
Hardness
6-6.5（mohs）
dielectric coefficient
ε=16.8
Size
10x3，10x5，10x10，15x15，，20x15，20x20，
Ф15,Ф20，Ф1″，Ф2″,Ф2.6″
Thickness
0.5mm，1.0mm
Polishing
Single-sided or double-sided
Crystal orientation
＜001＞
Crystal plane orientation accuracy
±0.5°
Edge orientation accuracy
2°（Special requirements can reach within 1°）
Bevel wafer
According to specific requirements, wafers with edge-oriented crystal planes inclined at a specific angle (inclination angle 1°-45°) can be processed
Ra:
≤5Å（5µm×5µm）
Package
Class 100 clean bag, Class 1000 super clean room
-
Dimension
10x3mm，10x5mm，10x10mm，15x15mm，20x15mm，20x20mm
Ф15,Ф20，Ф1″，Ф2″,Ф2.6″
Thickness
0.5mm，1.0mm